FEI Scios 2 - Dual Beam 2 with Focused Ion Beam
SEM: Field emission electron emitter, low vacuum capability. FIB: Tungsten and Platinum gas injection needles and micro-manipulator (EZ Lift needle). Electron detectors: back-scaterred, transmission and low vacuum. Micro-analysis: EBSD (OIM), XEDS. Cryo stage is also available. NPGS Electron beam lithography.
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