Scanning Electron Microscope - FIB SEM

FEI Scios 2 - Dual Beam 2 with Focused Ion Beam

SEM: Field emission electron emitter, low vacuum capability.  FIB: Tungsten and Platinum gas injection needles and micro-manipulator (EZ Lift needle).  Electron detectors: back-scaterred, transmission and low vacuum.  Micro-analysis: EBSD (OIM), XEDS.  Cryo stage is also available.  NPGS Electron beam lithography.