The Tescan Lyra 3GMU FIB Scanning Electron Microscope (SEM) is a dual beam field emission microscope.
In addition to standard SEM imaging capabilities, this microscope has additional capabilities. The EDAX Energy Dispersive Spectrometer (EDS) for elemental analysis of materials is particularly valuable for contamination identification and elemental mapping. The EDAX Electron Backscatter Diffraction capability provides material scientists with 2D and 3D grain structure analysis. An insitu tensile stage allows tension and compression to be done inside the chamber while using the SEM.
The Focused Ion Beam (FIB) allows for material removal for highlighting cross sections such as with microelectronics failure analysis.